New world no.2 Murray will face no. 1 Roger Federer first.
Federer, who won this tournament in 2005 and 2007, extended his winning streak against Lleyton Hewitt to 13 matches with a 6-3, 6-4 win.
Murray, the defending champion, defeated 'lucky loser' Julien Benneteau 4-6, 6-3, 6-1.
Meanwhile third-ranked and second-seeded Rafael Nadal beat Tomas Berdych 6-4, 7-5, setting up a semifinals rematch with fourth-seeded Novak Djokovic.
Djokovic, who beat Nadal in straight sets in last year’s Cincinnati semifinal, won 6-4, 7-5 over Gilles Simon.
Nadal, playing just his second tournament since the French Open due to tendinitis in both knees, declared himself “very happy” with his progress.
In the women's singles, second-seeded Serena Williams breezed through to the semifinals of the Rogers Cup on Friday with a 6-3, 6-2 victory over Lucie Safarova.
Williams will next face no. 4 Elena Dementieva, who advanced with a tough three-set win over Samantha Stosur.
In another semifinals, Alisa Kleybanova will face off with Maria Sharapova after a gruelling 6-7 (6), 7-6 (7), 6-2 win over Jelena Jankovic, while Sharapova overcame Agnieszka Radwanska 6-2, 7-6 (5).
(Via AP; Images via Yahoo! Sports)
